Shorter settling after index motion
Direct drive removes reducer backlash and elastic lag from belts or couplings, which helps the axis stop cleanly before the next process step.
Product lineup overview
Microtech Laboratory, JapanMicro Direct Drive Motor for Semiconductor Equipment
Compact backlash-free direct drive Motor for wafer handling, aligner theta Axis, wafer Index, rotary stage, inspection modules, optics, and vacuum-compatible rotary motion.
Semiconductor focusedCompact modules for wafer handling and precision rotary Axis
Wide hollow shaftRouting space for cables, air tubes, sensors, and vacuum lines
Fast settlingRepeatable indexing, low speed control, and clean stop behavior
Made in JapanDesign, manufacturing, and engineering support from Japan
Wafer handlingAligner theta AxisWafer IndexRotary stageInspection stageVacuum modules
Core Product Families
Compact direct drive motor families for wide scope of semiconductor equipment such as wafer handling systems, rotary stages, aligners, index tables, inspection equipment, and precision automation.
MD Series – Baseline Direct Drive Motor
- Compact footprint for space-constrained equipment modules
- Backlash-free direct drive structure for high-precision motion
- Optimized for rotary axis modules, wafer handling, and inspection.
Why it fits
Eliminates reducers and mechanical transmission, enabling faster settling time, improved positioning stability, and simplified system design.
MD-G Series – Geared / Hollow Shaft
- Through-hole structure for cable, air, laser and vacuum line routing
- Supports clean and efficient machine layout design
- Improves maintainability and service access in compact systems
Why it fits
Enables centralized routing through the axis, reducing cable interference, improving reliability, and maintaining compact equipment architecture. Also High precision Encoder integrated.
MR Series – High Rigidity
- Designed for rotary stages and wafer handling systems
- Shaft and flange runout below ±5 µm
- Large hollow shaft under 100mm diameter for routing and compact integration
Why it fits
Delivers stage-level rotational accuracy and rigidity without mechanical transmission, ensuring stable feedback performance and high-precision positioning.
Next Models in Development
Upcoming MS, MB, and MZ series for compact rotary motion, process modules, and vacuum-compatible semiconductor equipment.
MS Series – High speed DD Motor
- Compact direct drive motor for space-constrained modules
- Backlash-free structure for stable, high-precision motion
- Suitable for rotary axis modules, transfer units, and compact handling systems
Development focus
Focused on further size reduction while maintaining direct drive performance, enabling higher rotation speed in compact size.
MB Series – Integrated Brake
- Designed for spin, chuck, and rotary process applications
- High rigidity and smooth rotation due to high precision rotary encoder for process stability
- Integrated brake option for position holding and safety
Development focus
Optimized for process uniformity, stability and safety, supporting applications where rotation consistency directly impacts yield.
MZ Series – Vacuum rated Direct Drive
- Vacuum-compatible direct drive motor for controlled environments
- Low outgassing design for clean process conditions
- Suitable for vacuum and near-vacuum rotary axis modules
Development focus
Designed for vacuum process modules requiring compact structure, clean operation, and stable precision motion.
Applications
Our Micro Direct Drive Motors are used in a wide range of precision equipment in Japan and overseas, including semiconductor systems, life science equipment, factory automation, inspection, and other advanced motion applications.
Semiconductor Equipment
- Robot joints and theta Axis
- Indexing and alignment modules
- Spin units and rotary chucks
Why Micro fits
Backlash-free direct drive helps reduce mechanical transmission error, while the hollow shaft creates routing space for cables, air tubes, and vacuum lines inside compact semiconductor modules.
Robotics
- Compact wrists and joints
- Direct torque response
- Clean cable and air routing
Why Micro fits
Direct drive improves response in compact wrists and transfer modules by reducing couplings, gears, and belts, which also helps keep the layout cleaner.
Inspection Systems
- Stable low speed motion
- Repeatable positioning
- Fast settling behavior
Why Micro fits
Inspection, optics, and metrology modules benefit from low speed stability, repeatable indexing, and fewer transmission-related errors that affect image or beam positioning.
Direct Drive Motor Product Lineup
Main models for compact semiconductor motion, wafer handling robots, aligner theta Axis, Index, rotary stage, inspection Axis, and precision automation. Use the CAD button on each product card to request files and a quick model-fit review.
IDShaft
ODφ13mm
Torque25 mN·m
Height25.4mm
MDS13
Compact direct drive for lightweight handling and tight end effector spaces.
IDφ2.6 mm
ODφ21 mm
Torque0.13 N·m
Height31.5mm
MD20
Compact hollow shaft option for clean routing and dense packaging.
IDφ4 mm
ODφ30 mm
Torque0.42 N·m
Height31.5 mm
MD30
Smooth low speed control and stable stop behavior for precision modules.
IDφ12 mm
ODφ40 mm
Torque1 N·m
Height31.5 mm
MDH(12)-40
Large inner diameter for through routing and service access.
IDφ20 mm
ODφ60 mm
Torque2.5 N·m
Height31.5 mm
MDH-60
Large hollow shaft for joints and compact modules.
IDφ25 mm
ODφ70 mm
Torque3.1 N·m
Height31.5 mm
MDH-70
Direct drive for stage and joints where stable stop behavior is required.
IDφ41 mm
ODφ100 mm
Torque9.6 N·m
Height70 mm
MDH-100
Higher torque option for larger Axis where backlash is not acceptable.
IDφ25 mm
ODφ70 mm
Torque3.1 N·m
Height56 mm
MRS-70
High precision Motor for rotary stage where feedback quality matters.
USB
SPI—
I/O
EtherCAT
MC-200 Servo Driver
Driver optimized for Micro DD Motor performance, supports faster commissioning.
Selection support
Need a quick feasibility review for your semiconductor rotary axis?
Share target torque, speed, through-bore, routing, controller, and environment. MTL will recommend a practical Micro DD Motor or stage-oriented model for evaluation.
Micro DD Motor Specialized for Semiconductor
This overview shows where compact direct drive Motor fit across front-end and back-end semiconductor equipment, from wafer handling and aligners to dicing, packaging, optics, and vacuum rotary motion.
Examples on this map include wafer handling robots, wafer lifters, wafer spinners, wafer index tables, optical attenuators, alignment theta Axis, and vacuum rotary modules.
DD Motor Benefits
- Faster settling after index moves: less elastic lag than belt or reducer mechanisms.
- Stable repeatability over time: reduced backlash hysteresis and wear related drift.
- Cleaner routing: through bore routing reduces cable bending stress around rotating joints.
- Lower maintenance load: fewer parts, simpler assembly, and less periodic adjustment.
No backlash
Compact layout
Wide hollow shaft
Reduced maintenance points
Front-end, back-end, and common tool modules
Motion requirements change by process, but compact direct drive is often evaluated wherever stable indexing, clean cable routing, and low maintenance are important.
Front-end examples
- Cleaning and wet process tools
- Etch and deposition related handling
- Ion implantation
- PVD sputtering
- CMP and wafer preparation
- Inspection and metrology
Back-end examples
- Dicing and singulation
- Die attach and assembly
- Packaging and final test
- Handling and transfer modules
- Marking and inspection
- Optics and alignment mechanisms
Common tool modules
- Wafer transfer robot joint, wrist, and theta Axis
- Alignment theta stage and wafer indexer
- Spin station, rotary chuck, and rotary actuators
- In-vacuum rotary motion and feedthrough style Axis
- Optical attenuator wheel and filter mechanisms
Why Micro DD Motor
In semiconductor equipment, rotary axis selection is usually driven by settling behavior, repeatability, cable routing, maintenance load, and module footprint, not by final accuracy alone. The points below are the reasons direct drive is often selected for wafer handling, aligner theta Axis, rotary stage, optics, inspection modules, and vacuum compatible rotary motion.
Stable low speed motion
Useful for aligner theta Axis, inspection stage, optical modules, and metrology mechanisms that need smooth interpolation and repeatable stop position.
Wide hollow routing
Through-routing for cables, air tubes, sensors, optics, and vacuum lines can simplify the rotary axis layout and reduce cable stress inside compact modules.
Fewer mechanical parts around the axis
Replacing belts, pulleys, and gearboxes can reduce wear points and make the mechanism easier to package, service, and evaluate inside a real machine frame.
Repeatable positioning in compact modules
Backlash-free motion is useful for wafer transfer, rotary chucks, index tables, robot wrists, and inspection Axis where position repeatability matters every cycle.
Cleaner fit for semiconductor equipment
Compact direct drive architecture is often easier to apply when the module must balance space, routing, reliability, maintenance, and motion quality at the same time.
Micro Direct Drive Motor
Compact direct drive for real machine integration
Micro DD Motor is Microtech Laboratory’s compact direct drive servo Motor for high-precision motion in tight spaces. Gearless direct drive removes backlash and reduces wear points. A hollow shaft supports cable, air tube, vacuum line, and sensor routing through the axis, which is often critical in wafer handling robots, aligner theta stage, wafer Index, rotary chucks, optics, and vacuum modules.
Designed for practical semiconductor equipment integration.
Wafer handling
Inspection systems
Handling and transfer
Optics and metrology
Cleanroom equipment
Vacuum modules
Precision automation
Equipment builders usually compare these points first when reviewing a wafer handling axis, aligner theta stage, spinner, optics wheel, inspection axis, or vacuum rotary module.
Key terms in Motor Selection
What is a Direct Drive Motor? (DD Motor)
A direct drive Motor generates torque directly on the load, without belts or reducers. This removes backlash and elastic behavior from transmission parts. In precision equipment, fewer transmission parts usually means faster settling, more stable repeatability, and less drift over long operation.
What is a Hollow Shaft Motor?
A hollow shaft Motor has a center through hole for routing cables, pneumatic lines, vacuum lines, sensors, and sometimes optics. In semiconductor tools, routing often becomes a mechanical reliability issue. Hollow routing reduces cable stress, simplifies assembly, and improves maintenance access.
What is a Micro Direct Drive Motor (Micro)?
Micro direct drive is a compact direct drive class designed for smaller Axis where space is limited. It is used when direct drive performance is needed, but the footprint of a conventional torque Motor is too large for the module.
Who is Microtech Laboratory (MTL)?
Microtech Laboratory Co., Ltd. is a Japanese manufacturer specialized in rotary encoders and direct drive Motor. We design and manufacture in Japan with a focus on compact integration, tuning support, and stable supply for production equipment.
How to choose DD Motor
These are the points equipment builders usually confirm first when comparing a direct drive axis for wafer handling, aligners, rotary stage, chucks, inspection stations, and vacuum compatible modules.
01
Module envelope
Start with allowable outside diameter, overall height, mounting space, and surrounding hardware. In compact tools, packaging limits the shortlist first.
02
Inner diameter and routing
Confirm cable, air tube, vacuum line, sensor, or optical routing through the axis. This often determines whether a hollow shaft Motor is the right architecture.
03
Settling and low speed behavior
For indexing, alignment, and inspection, the important question is not just torque. Check stop stability, settling time, and controllability near the target point.
04
Repeatability and feedback
Review encoder resolution, repeatability target, and mechanical rigidity together. Motion quality comes from the Motor, feedback, and structure as one system.
05
Environment and maintenance
Consider cleanroom use, vacuum compatibility, routing stress, and expected maintenance access. Fewer transmission parts usually simplify service planning.
06
Driver and control interface
Confirm required interface, tuning workflow, and control architecture early, especially if the axis must integrate with an existing driver or synchronized motion system.
From conventional constraints to direct drive simplification
Servo + Belt
→
Micro Direct Drive
Servo + Reducer
→
Micro Direct Drive
Why this is effective in semiconductor equipment
Direct drive removes common error sources that appear after long hours of production.
- Less compliance: reduces elastic lag, helps shorten settling time after index moves.
- No backlash: improves repeatability and reduces hysteresis, especially in direction changes.
- Fewer wear points: no belt tension drift, no reducer wear, less periodic adjustment.
- Cleaner routing: hollow routing reduces cable bending stress and interference around rotating joints.
- Serviceability: simpler assembly and fewer components can reduce maintenance time.
Applications and Case Studies
Representative module examples for semiconductor equipment, robotics, optics, and inspection systems. Each example below highlights why engineers choose a compact direct drive Motor instead of a belt, coupling, or geared mechanism.
1) Wafer handling robot joint
Application Details
Rotary joint for wafer transfer arms, wrists, and theta Axis. It needs stable stop behavior and reliable routing in compact space.
Benefits
Removes backlash and elastic lag from belts or reducers. Improves repeatability and simplifies routing through the axis.
Backlash freeShorter settlingHollow routingFewer wear points
2) Alignment theta stage
Application Details
Theta axis used to align wafer orientation before process or inspection. It often requires stable low speed control and clean stop behavior.
Benefits
Cleaner interpolation at low speed and more consistent stop behavior. Reduced backlash improves repeatability in frequent indexing.
Smooth low speedRepeatable positioningNo reducer hysteresisCompact packaging
3) Optical and metrology stage
Application Details
Optical alignment and measurement stage that require stable stop position, smooth low speed motion, and predictable behavior over long operation.
Benefits
Eliminates backlash and reduces error sources that can shift over time. Helps improve repeatability and low speed control.
High precisionStable low speedNo backlashHigh rigidity packaging
4) Wafer inspection and indexing stage
Fast settlingRepeatable indexingNo backlash
5) Dispensing module
Stable low speedRepeatable stopLess compliance
6) End effector wrist
Hollow routingCompactBacklash free
7) Chip mounter, turret indexing
High torque densityFewer partsStable stop
8) Robot joint, haptic module
Back drivabilityDirect torqueHollow routing
9) Lifter module
Simpler assemblyLess maintenanceStable repeatability
10) Optical attenuator wheel, filter mechanism
Repeatable indexingNo backlashSimpler mechanism
11) Vacuum environment axis
CompactFewer partsThrough bore
12) Gimbal and optical alignment axis
Backlash freeSmooth controlCompact routing
Front End Case Studies
Examples below focus on front-end semiconductor modules where a compact MTL direct drive Motor is useful for compact packaging, stable stop behavior, routing, and repeatable rotary motion.
Case 1) Wafer Pre-Aligner Theta Axis
Recommended Product: MDH-60, MDH-70, or MRS-70 class, depending on outer diameter, torque, and through-bore requirements.
Case 2) Wafer Cleaning and CMP Equipment
Recommended Product: MDH-60 or MDH-70 class for compact hollow-shaft rotary joints where routing and packaging are both critical.
Case 3) Front-end inspection or review indexing stage
Recommended Product: MRS-70 or MDH-100 class when higher stiffness, repeatability, or stage-side torque margin is required.
Application support
Discuss your module before you lock the axis design
For wafer handling, aligner theta Axis, optical attenuators, rotary chucks, inspection stage, and vacuum rotary modules, MTL will help selection support.
Benefits of Micro DD Motor
Micro direct drive motor is designed for compact, high precision modules where repeatability, routing, and service access matter in production tools.
No backlash
Improves repeatability and reduces direction-change hysteresis.
High rigidity
Supports stable stop behavior and improves tuning margin for fast indexing.
Encoder-centric precision
Stable feedback quality supports fine positioning and smooth interpolation.
Hollow shaft routing
Reduces cable and tube stress, supports cleaner layout and service access.
High torque density
Helps keep modules compact while maintaining torque margin at low speed.
Compact footprint
Useful when conventional torque Motor do not fit in the available envelope.
Lightweight design
Supports moving Axis and wrists where mass impacts response and vibration.
Back drivability support
Useful for robot joints and interaction Axis where controllability matters.
Customization and Options
We can support mechanical interface, routing, and control related customization for real equipment constraints.
Mechanical
Case and flange customization
Mount interface customization for flange dimensions, case structure, and integration compatibility.
Why Micro helps
A compact direct drive Motor often reduces the number of coupling parts around the rotary axis, making interface design cleaner.
Routing
Hollow shaft customization
Through hole size and routing optimization for cables, optics, laser, pneumatic and vacuum lines.
Why Micro helps
Wide hollow routing is one of the clearest reasons to select Micro DD Motor when cable bending and serviceability limit conventional designs.
Control
Encoder Customization
Encoder feedback and tuning support for tighter repeatability and smoother interpolation.
Why Micro helps
Direct drive plus encoder tuning support is useful when inspection or handling Axis need clean motion at low speed with reliable repeatability.
Engineering Support for Evaluation and Production
From first feasibility check to tuning and production launch, MTL supports Motor selection, driver matching, and application-specific setup for semiconductor equipment.
Selection support
We help define a realistic starting point for your axis, load condition, routing needs, and mounting constraints.
- Motor and driver matching support
- Torque margin and duty check
- Initial parameter guidance
Tuning and optimization support
Support focused on settling, stability, repeatability, and smooth motion in your actual machine structure.
- Gain Tuning Support through WEB Meeting
- Step response and vibration suppression
- Guidance for controller
After-sales support
Support continues after shipment to help keep line operation stable during evaluation and production use.
- Mechanical troubleshooting support
- Quality-checked production units
- Long-term operation guidance
Driver collaboration
Driver compatibility for machine development
Micro direct drive motor is designed to integrate smoothly with industry-standard servo drivers, including Mitsubishi Electric, Panasonic, and EtherCAT Environtment. This helps equipment builders move faster from wiring review to commissioning while keeping motor and driver selection practical for real machine development.
Semiconductor Direct Drive Motor FAQ
Common questions about evaluation, integration, tuning, and production use.
A direct drive Motor outputs torque directly to the load without a gearbox. This removes backlash and reduces hysteresis caused by mechanical transmission parts. In semiconductor rotary Axis, this often improves settling behavior and repeatability, especially with frequent indexing and direction changes.
Settling time directly affects tact time. Even if final accuracy is good, slow settling reduces throughput. Direct drive can reduce elastic lag from belts and reducers, helping the axis reach a stable position faster when the structure and tuning are matched.
In many modules, routing becomes a reliability and maintenance access issue. A through bore path reduces repeated bending and torsion on cables and tubes, reduces interference around rotating joints, and supports a more compact layout.
- Settling time and stop stability
- Repeatable positioning over long operation
- Torque margin at low speed and during acceleration
- Encoder resolution and feedback quality
- Rigidity and resonance behavior of the full axis structure
- Routing method and mechanical envelope
Yes, depending on Motor selection and tuning. Low speed stability depends on torque characteristics, encoder feedback resolution, drive control, and mechanical resonance. Share your speed range and stability target and we will recommend a suitable configuration.
Please share your environment requirements (cleanroom class, vacuum level, outgassing constraints, allowable materials, heat constraints). We will confirm feasibility and propose the most realistic configuration for evaluation.
Yes. Depending on the driver and your control architecture, Micro DD Motor can be integrated into EtherCAT and PLC based systems.
- Load inertia, payload, and mounting constraints
- Move angle, speed, acceleration, and cycle time
- Target settling time and repeatability
- Through bore size requirement and routing plan
- Environment constraints (cleanroom or vacuum)
- Controller interface and power constraints
Yes. We provide baseline parameter guidance and advanced tuning support focused on step response, vibration suppression, and settling optimization in your machine structure.
Yes. We support evaluation, pilot builds, and mass production. Share your schedule and expected volume so we can align lead time and supply planning. There is no MOQ and 1 unit order is totally acceptable.
About us
At Microtech Laboratory Co., Ltd., we develop compact motion solutions that improve equipment value and enable designs that are difficult with conventional mechanisms. With precision assembly technology, we focus on development, manufacturing, and sales of ultra-compact products that support stable, repeatable motion in real machines.
Made in Japan
We maintain a production system that supports high quality and stable supply. The specifications we provide are guaranteed values, including safety margins for reliable operation. In addition, our components are sourced from Japan, supporting a stable supply chain and consistent quality.
Manufacturing system
During design, we verify target values and feasibility to balance quality and function. Our manufacturing system reflects this approach, delivering products that meet equipment requirements in real production environments.
Full range of after-sales services
Our products undergo testing under a quality assurance system. If any defects arise, we offer a free replacement, providing customers with peace of mind.
MTL at a glance
For this landing page, a compact trust section works better than a long company data table. It keeps focus on evaluation, engineering support, and contact.
Made in Japan
Design, manufacturing, and support are handled in Japan for precision motion applications.
Since 1981
Long manufacturing history in rotary encoders and direct drive Motor related motion products.
Engineering support
MTL reviews module constraints such as outer diameter, inner diameter, torque, settling, routing, and environment.
English support
Direct communication for overseas customers about wafer handling, pre-aligners, inspection, and rotary motion.
Contact MTL
For pricing, lead time, and technical review, send your module details. We will support selection and next-step discussion.
Ahmad Ridwan
Overseas Sales Engineer
Company: Microtech Laboratory Co., Ltd.
Contact route: Please use the Contact form or LinkedIn for the fastest response.
Include your module type, move angle, cycle time, speed, acceleration, inertia, through-bore requirement, and environment if available.