Wafer Flipper Module

小型・軽量・高精度

Wafer inversion mechanism

An apparatus used in semiconductor manufacturing.

A semiconductor wafer is the base material for integrated circuits (ICs) and other electronic devices, and the process requires multiple front- and back-side steps.

This mechanism precisely and automatically flips the wafer’s orientation during those steps.

Next-generation handling enabled by high torque, ultra-compact size, and a hollow shaft

Our direct-drive (DD) motor delivers an innovative solution for the critical “inversion” motion in precision handling.
The DD motor integrated in the red-circled area provides three key advantages—high torque, ultra-compact size, and a hollow shaft—that translate into clear benefits.

Motor used: MDH-6018-500KE